[ Instrument Network Instrument R & D ] With the development of the optical industry and related technical fields, the demand for the detection accuracy of the optical surface shape is also increasing. The spherical absolute detection method can remove the influence of the reference surface shape error, thereby improving the detection accuracy of the tested surface.
In addition, driven by major projects such as astronomy and space optics, high-power laser devices, ultra-strong ultra-short laser devices, and free electron laser devices, the demand for large-caliber high-precision optical elements is increasing, and traditional large-caliber optical element interference detection methods The relative measurement method is mainly used. The detection accuracy of this method is limited by the accuracy of the standard flat crystal plane shape of the interferometer itself, especially when the PV value of the large-diameter optical element surface shape to be measured is better than 0.1λ, the interferometer refers to the flat crystal System errors can no longer be ignored.
For this reason, the research team of the Precision Optics Manufacturing and Testing Center of the Shanghai Institute of Optics and Fine Mechanics of the Chinese Academy of Sciences has made new progress in the research direction of Φ600mm absolute interferometer absolute detection technology, and proposed an in-situ absolute surface shape detection technology based on the principle of multi-surface interference. The in-situ measurement of the absolute flat shape error of the standard flat crystal of Φ600mm caliber interferometer is realized. This method does not need to move and replace the standard transmission flat crystal of the interferometer itself, and does not need to rotate the standard reflection flat crystal. This greatly improves the measurement stability and reduces the risk of disassembling the large-aperture interferometer standard flat crystal. The wavefront error does not lose the IF wavefront error information.
An in-situ absolute shape detection method proposed by researchers based on the principle of multi-surface interference. Absolute surface shape measurement can be completed by an auxiliary transmission flat crystal and four groups of measurements. The absolute surface shape detection method is a The plane crystal surface shape error is separated from the measurement results, so that the method of obtaining the absolute surface shape of the device under test can achieve surface shape measurement with sub-nanoscale accuracy.
The research results can not only improve the detection accuracy of the existing Φ600mm caliber laser plane interferometer, provide high-confidence measurement results for the processing of large-caliber high-precision optical components, but also establish a Φ600mm caliber standard flat crystal metrology standard for the industry and even the country Provide theoretical and technical support.
The Shanghai Institute of Optics and Fine Mechanics of the Chinese Academy of Sciences was established in May 1964. Since the establishment of the Institute, the Shanghai Institute of Optics and Mechanics has completed a series of major scientific research projects, including major optical and laser cutting-edge basic and applied basic research projects, and large-scale laser applications. Engineering research, etc .; the only “Shenguang II†integrated high-power laser device, ultra-strong ultra-short laser device, and laser atom that have both domestic and international few high-energy short-pulse laser loading and active probe light functions Cooling device, space all solid-state laser development platform, etc., and has a variety of new and high-performance laser devices, laser and optoelectronic functional materials development platform.
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